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●ＱＲ４００Ｋ Ellipsometry + Defect Detection ●New Minute Measurement System for Semiconductor Surface ●New Approach for Analyzing Wafer Roughness ●Roughness and Thickness ●Poly Silicon ●SIMOX ●3 Machines of BEPE ●Function of BEPE ●Application BEPE on process ●BEPE Guidebook |