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Product
2 Dimension Ellipsometer BEPE
Ellipsometer is the excellent optical machine to measure thickness or refractive index of dielectric films.
2 Dimension ellipsometer is the ellipsometer for next generation.
BEPE is the most accurate and the highest through put ellipsometer in the world.

What is PEL?
PEL(Parallel Ellipsometry) is a method, which has put functions of 100,000 conventional ellipsometers (i.e.1 Point measuring Ellipsometer) in parallel in one machine.
It has unique architecture and algorithm developed by HEUREKA CO.
US Patent issued.
What is MFE algorithm?
Multilayer thin Film Ellipsometry
Our newly developed algorithm made possible to measure materials, thickness, or films, which are important but not possible to be measured by
conventional techniques.
US Patent issued.
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